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TLMG-400

Laser Processing Equipment for Semiconductor Applicaion

Green Laser Marking System TLMG-400

TLMG-400 offers large area and multiple unit marking function, it has capable of marking multiple units at once to increase availability. The auto angle compensation has capable of avoiding angular rotational offset between individual units. It also has EFEM with SECS/GEM function. Furthermore, the real-time monitoring of laser power provides higher marking quality.


Specification

Item

TLMG-400

Axis

1

Laser type

Nd: YVO4 Green Laser

Wavelength

532 nm

Max. average power

>5 W @80kHz

Pulse frequency

Single shot~300 kHz

Pulse width

<8 ns @80kHz

X-Y working area

300×300 mm

X-Y axis moving speed

50 m/min

Galvano scanning area

160×160 mm

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